| Specifications (ELA6146 / EMA6151) |
Max. Board Size |
24 x 18"(610 x 460mm) / 24 x 20"(610 x 510mm) |
Number of Probe |
2 Top, 2 Bottom |
Min. Board Size |
4 x 6"(100 x 150mm) |
Max. Board Thickness for Clamping |
0.06-0.14"(1.2-2.5mm)†1 |
Repeatable Accuracy |
±0.000394"(±10µm) / ±0.000157"(±4µm) |
Resolution |
0.000236"(6µm) / 0.000079"(2µm) |
Min. Pad Pitch |
0.007087"(180µm) / 0.004724"(120µm) |
Min. Pad Size |
0.003937"(100µm) / 0.002326"(60µm) |
Test Voltage of Resistance Measurement |
Continuity test : 0-10V Isolation test : 250V(500V/1000V option) |
Test Current of Resistance Measurement |
Continuity test : 2.65 µA-125mA |
Clamp System |
Pneumatic |
Number of CCD Camera |
2 Top, 2 Bottom |
Monitor |
included |
Printer |
internal |
Air Requirements(Pressure, Consumption) |
0.5MPa, 53gal/min.(200Ltr/min.) |
Power Supply (Single Phase AC200-240V 50/60Hz)†2 |
10A / 15A |
Weight |
2778lbs.(1260kg) / 3307lbs.(1500kg) |
Dimensions |
 |
